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dr Peter N. Heys
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| e-mail: | ***@sial.com |
| phone: | +44-151-3342774 |
| fax: | +44-151-3346422 |
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| interest(s): | |
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Affiliation: |
Epichem Ltd |
Participant: |
| began: | 2007-09-17 |
| ended: | 2007-11-30 |
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Publications: |
- Recent development in the design of cyclopentadienyl-based precursors for the ALD of high-κ thin films
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