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dr Qi Fang |
| e-mail: | |
| phone: | +44-1934-837034 |
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Affiliation: |
Oxford Instruments Plasma Technology|
| address: | North End, Yatton, Bristol, BS49-4AP, United Kingdom | | phone: | | | fax: | | | web: | | |
Participant: |
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Publications: |
- SiO2 and Si3N4 Films by Remote Plasma Enhanced Atomic Layer Deposition
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