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dr Qi Fang
e-mail:
***@oxinst.co.uk
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+44-1934-837034
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interest(s):
Affiliation:
Oxford Instruments Plasma Technology
address:
North End, Yatton, Bristol, BS49-4AP,
United Kingdom
phone:
fax:
web:
Participant:
E-MRS Fall Meeting 2007
began:
2007-09-17
ended:
2007-11-30
Presented:
E-MRS Fall Meeting 2007
SiO
2
and Si
3
N
4
Films by Remote Plasma Enhanced Atomic Layer Deposition
Publications:
SiO
2
and Si
3
N
4
Films by Remote Plasma Enhanced Atomic Layer Deposition
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