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- Stefan Nawka
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| e-mail: | ***@qimonda.com |
| phone: | +49-351-8868368 |
| fax: | +49-351-8867312 |
| web: | |
| interest(s): | |
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Affiliation: |
Qimonda Dresden
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| address: | Königsbrücker Straße 180, Dresden, 01099, Germany | | phone: | | | fax: | | | web: | | |
Affiliation: |
Dresden University of Technology, Institute of Semiconductors and Microsystems
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| address: | Nöthnitzer Straße 64, Dresden, 01187, Germany | | phone: | | | fax: | | | web: | | |
Participant: |
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Publications: |
- Characterization of the initial growth of hafnium silicate films in dependence of process parameters and substrate materials
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