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prof Michael Heuken
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Affiliation:
AIXTRON SE
address:
Kaiserstrasse 98, Herzogenrath, 52134,
Germany
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Participant:
17th International Conference on Crystal Growth and Epitaxy - ICCGE-17
began:
2013-08-11
ended:
2013-08-16
Presented:
17th International Conference on Crystal Growth and Epitaxy - ICCGE-17
Next generation production MOVPE - on the role of in-situ metrology for process control and yield enhancement
Publications:
Next generation production MOVPE - on the role of in-situ metrology for process control and yield enhancement
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