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prof Marco Fanciulli

e-mail:
phone: +39-039-6036253
fax: +39-039-6881175
web:
interest(s):

Affiliation:

MDM National Laboratory CNR-INFM

address: Via Olivetti 2, Agrate Brianza, 20041, Italy
phone: +39-039-6037489
fax: +39-039-6881175
web: http://www.mdm.infm.it

Participant:

E-MRS Fall Meeting 2007

began: 2007-09-17
ended: 2007-11-30
Presented:
E-MRS Fall Meeting 2007
In-situ investigation of the early stages of the growth by ALD of high-k dielectrics on silicon and high mobility-substrates

Publications:
  1. In-situ investigation of the early stages of the growth by ALD of high-k dielectrics on silicon and high mobility-substrates
  2. Thin NiO films grown by atomic layer deposition using cyclopentadienyl-type of precursors and ozone



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