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dr Raija Matero
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Affiliation:
ASM Microchemistry
address:
Väinö Auerin katu 12 A, Helsinki, 00560,
Finland
phone:
fax:
+358-9-52554600
web:
Participant:
E-MRS Fall Meeting 2007
began:
2007-09-17
ended:
2007-11-30
Presented:
E-MRS Fall Meeting 2007
Investigating New Precursors for Silicon Dioxide
Publications:
Investigating New Precursors for Silicon Dioxide
Low Temperature Deposition of Tantalum Carbide
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