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dr Raija Matero
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| e-mail: | ***@asm.com |
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Affiliation: |
ASM Microchemistry
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| address: | Väinö Auerin katu 12 A, Helsinki, 00560, Finland | | phone: | | | fax: | +358-9-52554600 | | web: | | |
Participant: |
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Publications: |
- Investigating New Precursors for Silicon Dioxide
- Low Temperature Deposition of Tantalum Carbide
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