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dr Masashi Ishii
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phone:
+81-29-8604576
fax:
+81-29-8592801
web:
interest(s):
Affiliation:
National Institute for Materials Science
address:
1-2-1 Sengen, Tsukuba, 305-0047,
Japan
phone:
+81-29-8592000
fax:
web:
http://www.nims.go.jp/
Participant:
E-MRS Fall Meeting 2008
began:
2008-09-15
ended:
2008-09-19
Presented:
E-MRS Fall Meeting 2008
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Thin Film Deposited by Two-step Process and Its Resistance to Halogen Plasma
Publications:
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Thin Film Deposited by Two-step Process and Its Resistance to Halogen Plasma
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