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Patrick S. Lysaght

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Affiliation:

SEMATECH

address: , Austin, TX, 78741-6499, United States
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Affiliation:

Bridgestone/Firestone Research, LLC

address: 1200 Firestone Parkway, Akron, OH, 44317-000, United States
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web: http://www.bridgestone-firestone.com

Participant:

E-MRS Fall Meeting 2005

began: 2005-09-05
ended: 2005-09-09
Presented:
E-MRS Fall Meeting 2005

Spectroscopic analysis of thin HfO2 and HfSiOx gate dielectric thin films exposed to NH3 anneal processing

Publications:

  1. Spectroscopic analysis of thin HfO2 and HfSiOx gate dielectric thin films exposed to NH3 anneal processing



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