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dr Lutz Wilde
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phone:
+49-351-43882787
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interest(s):
Affiliation:
Fraunhofer Center Nanoelektronische Technologien
address:
, Dresden, 01099,
Germany
phone:
fax:
web:
Participant:
11th European Powder Diffraction Conference
began:
2008-09-19
ended:
2008-09-22
Presented:
11th European Powder Diffraction Conference
In-situ GIXRD studies on Hf
(1-x)
Si
x
O
2
dielectrics
Publications:
In-situ GIXRD studies on Hf
(1-x)
Si
x
O
2
dielectrics
Thermal Stability of thin ALD ZrO
2
Layers as Dielectrics in Deep Trench DRAM Devices Annealed in N
2
and NH
3
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