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Kunyuan Gao
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Affiliation:
Universität Erlangen-Nürnberg, Institut für Technische Physik II
address:
Erwin-Rommel-Str. 1, Erlangen, 91058,
Germany
phone:
49-(0)9131-852-8319
fax:
49-(0)9131-852-7889
web:
http://www.tp2.uni-erlangen.de/index.html
Participant:
E-MRS Fall Meeting 2005
began:
2005-09-05
ended:
2005-09-09
Presented:
E-MRS Fall Meeting 2005
The interface of atomic layer deposited Al
2
O
3
on silicon
Publications:
The interface of atomic layer deposited Al
2
O
3
on silicon
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