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dr Jaakko Niinistö
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phone:
+358-50-3210548
fax:
+358-9-19150198
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interest(s):
Affiliation:
Department of Chemistry, University of Helsinki
address:
A. I. Virtasen aukio 1, Helsinki, FIN-00014,
Finland
phone:
+358-9-19150207
fax:
+358-9-19150198
web:
Participant:
E-MRS Fall Meeting 2007
began:
2007-09-17
ended:
2007-11-30
Presented:
E-MRS Fall Meeting 2007
ALD of ZrO
2
Thin Films Exploiting Novel Mixed Alkylamido-Cyclopentadienyl Precursors
Publications:
Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics
ALD of ZrO
2
Thin Films Exploiting Novel Mixed Alkylamido-Cyclopentadienyl Precursors
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