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dr Vladimir Egorov
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phone:
+7-496-5241217
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+7-496-5244225
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Affiliation:
Institute of Microelectronics Technology, Russian Academy of Science
address:
Institutskaja, 6, Chernogolovka, 142432,
Russian Federation
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fax:
web:
http://www.ipmt-hpm.ac.ru
Publications:
Possibilities of thin film multilayer structures study by X-ray and ion beam complex of nondestructive methods
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