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prof Cheol Seong Hwang

e-mail:
phone: +82-2-8807535
fax: +82-2-8841413
web:
interest(s):

Affiliation:

Seoul National University

address: School of Mat. Sci. Eng., Seoul, 151742, Korea, South
phone: +82-2-880-7169
fax: +82-2-886-4156
web: http://www.snu.ac.kr

Participant:

E-MRS Fall Meeting 2007

began: 2007-09-17
ended: 2007-11-30
Presented:
E-MRS Fall Meeting 2007
Dielectric and electrode thin films for stack-cell structured DRAM capacitors with sub 50-nm design rules

Publications:
  1. Atomic-layer-deposition and local ferroelectric properties of PbTiO3 and Pb(Zr,Ti)O3 thin films
  2. Dielectric and electrode thin films for stack-cell structured DRAM capacitors with sub 50-nm design rules
  3. Influence of substrates on the growth of Ge2Sb2Te5 films by combined atomic-layer- and chemical-vapor-deposition



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