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- Clément Barriere
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Affiliation:
Laboratoire de Chimie de Coordination
address:
205 route de Narbonne, Toulouse, 31077,
France
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web:
http://www.lcc-toulouse.fr
Affiliation:
STMicroelectronics
address:
, Tours, 37071,
France
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Participant:
E-MRS Fall Meeting 2007
began:
2007-09-17
ended:
2007-11-30
Presented:
E-MRS Fall Meeting 2007
Copper deposition using wet chemistry. A new way : Organometallic chemistry for microelectronics
Publications:
Copper deposition using wet chemistry. A new way : Organometallic chemistry for microelectronics
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