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- Nicolas Blasco |
| e-mail: | |
| phone: | +33-6-11132376 |
| fax: | +33-1-39076430 |
| web: | |
| interest(s): | |
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Affiliation: |
Air Liquide Research and Development|
| address: | 1 Chemin de la Porte des Loges, Jouy-en-Josas, 78354, France | | phone: | | | fax: | | | web: | | |
Participant: |
| began: | 2007-09-17 |
| ended: | 2007-11-30 |
| Presented: | |
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Publications: |
- ALD of ZrO2 Thin Films Exploiting Novel Mixed Alkylamido-Cyclopentadienyl Precursors
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