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Valentina A. Yakovtseva

e-mail: ***@yahoo.com
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Affiliation:

Belarusian State University of Informatics and Radioelectronics

address: P.Brovka str. 6, Minsk, 220000, Belarus
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web: http://www.unibel.bsuir.by

Participant:

E-MRS Fall Meeting 2003

began: 2003-09-15
ended: 2003-09-11
Presented:
E-MRS Fall Meeting 2003
Silicon nitride on a thin amorphous silicon as a mask for chemical and thermal treatments

Publications:
  1. Silicon nitride on a thin amorphous silicon as a mask for chemical and thermal treatments



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