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Valentina A. Yakovtseva
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Affiliation:
Belarusian State University of Informatics and Radioelectronics
address:
P.Brovka str. 6, Minsk, 220000,
Belarus
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web:
http://www.unibel.bsuir.by
Participant:
E-MRS Fall Meeting 2003
began:
2003-09-15
ended:
2003-09-11
Presented:
E-MRS Fall Meeting 2003
Silicon nitride on a thin amorphous silicon as a mask for chemical and thermal treatments
Publications:
Silicon nitride on a thin amorphous silicon as a mask for chemical and thermal treatments
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