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Andrian V. Kuchuk

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Affiliation:

V.Lashkaryov Institute of Semiconductor Physics NAS Ukraine

address: Nauky prosp., Kyiv, 03028, Ukraine
phone: 265-40-20
fax: 265-83-42
web: http://www.isp.kiev.ua

Participant:

E-MRS Fall Meeting 2005

began: 2005-09-05
ended: 2005-09-09
Presented:
E-MRS Fall Meeting 2005

Relationship between condition of deposition and properties of W-Ti-N thin films prepared by reactive magnetron sputtering

Publications:

  1. Relationship between condition of deposition and properties of W-Ti-N thin films prepared by reactive magnetron sputtering



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