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Joel Barnett

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Affiliation:

SZPITAL WOJEWÓDZKI W BEŁCHATOWIE

address: Poziomkowa 5, Bełchatów, 97-400, Poland
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Affiliation:

SEMATECH

address: , Austin, TX, 78741-6499, United States
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Publications:

  1. Spectroscopic analysis of thin HfO2 and HfSiOx gate dielectric thin films exposed to NH3 anneal processing



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