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Jens Dennemarck
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Affiliation:
University of Bremen
address:
Otto-Hahn-Allee, Bremen, 28359,
Germany
phone:
fax:
web:
http://www.mcb.uni-bremen.de
Affiliation:
University of Bremen, Institute of Solid State Physics
address:
P.O. Box 330440, Bremen, 28334,
Germany
phone:
+49 421 218 7453
fax:
+49 421 218 4581
web:
http://www.ifp.uni-bremen.de
Publications:
TaSiN, TiSiN and TiWN diffusion barriers for metallization systems to GaN
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