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Radoslaw Lukasiewicz
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Affiliation:
Institute of Electron Technology
address:
al. Lotników 32/46, Warszawa, 02-668,
Poland
phone:
(4822)5487792
fax:
(4822)8470631
web:
http://www.neti.ite.waw.pl
Publications:
TaSiN, TiSiN and TiWN diffusion barriers for metallization systems to GaN
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