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Diwakar Garg
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Affiliation:
Computational Modeling Center, Corporate Science and Technology Center and Schumacher, Air Products and Chemicals, Inc.
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7201 Hamilton Boulevard, Allentown, PA, 18195,
United States
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Publications:
First-principles simulations of the reactivity of barrier layers of Ti, Ta and W and their nitrides towards precursors for CVD copper deposition
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