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Benoît Braida |
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Affiliation: |
Institut de Ciencia de Materials (ICMAB) - CSIC|
| address: | Campus de la UAB, Barcelona, 080193, Spain | | phone: | | | fax: | | | web: | http://www.icmab.es | |
Affiliation: |
Instituto de Ciencia de Materiales de Barcelona, CSIC|
| address: | Campus UAB, Barcelona, 08193, Spain | | phone: | | | fax: | | | web: | | |
Affiliation: |
CNRS - Laboratoire de Chimie Theorique, Université Pierre et Marie Curie|
| address: | 4 Place Jussieu, Paris, 75252, France | | phone: | | | fax: | | | web: | | |
Publications: |
- First-principles simulations of the reactivity of barrier layers of Ti, Ta and W and their nitrides towards precursors for CVD copper deposition
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