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Marcin Kaczmarski
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Affiliation:
Institut de Ciencia de Materials (ICMAB) - CSIC
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Campus de la UAB, Barcelona, 080193,
Spain
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http://www.icmab.es
Affiliation:
Instituto de Ciencia de Materiales de Barcelona, CSIC
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Campus UAB, Barcelona, 08193,
Spain
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Publications:
First-principles simulations of the reactivity of barrier layers of Ti, Ta and W and their nitrides towards precursors for CVD copper deposition
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