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Jani Päiväsaari

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Affiliation:

Helsinki University of Technology, Laboratory of Physics

address: Otakaari 1 M, Espoo, 02150, Finland
phone: +358-9-4513144
fax: +358-9-4513116
web: http://www.fyslab.hut.fi

Affiliation:

Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, P.O. Box 6100, FIN-02015 Espoo

address: , Helsinki, , Finland
phone:
fax:
web:

Publications:
  1. Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics



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