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Jani Päiväsaari |
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Affiliation: |
Helsinki University of Technology, Laboratory of Physics|
| address: | Otakaari 1 M, Espoo, 02150, Finland | | phone: | +358-9-4513144 | | fax: | +358-9-4513116 | | web: | http://www.fyslab.hut.fi | |
Affiliation: |
Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, P.O. Box 6100, FIN-02015 Espoo|
| address: | , Helsinki, , Finland | | phone: | | | fax: | | | web: | | |
Publications: |
- Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics
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