We investigated VPE-grown ZnO NWs on a Si substrate by SEM. SEM investigations show that there are single NWs and ensembles of NWs, among which we found straight and bend, perfect (with regular facets and smooth surfaces) and non-perfect (with irregular facets, not smooth surfaces, variable width, damages and particles) NWs, as well as NWs with clean surfaces and surfaces with the dark spots and features. After FIB polishing we found that every NW has a clean homogeneous surface, which allow us to conclude that all those dark spots and surface features of the NWs really are just surface features. The FIB milling gives information of the deeper interior of the NWs, i.e. buried structures within the NWs and whether those structures are propagating within the NWs. But also here we found that there are no buried structures inside the NWs and the dark spots and features are not propagating within the NWs, which leads to the result that the NWs are totally homogeneous. The hexagonal facets of the NWs were observed on SEM images, which emphasizes the good crystalline quality of the NWs. The sizes of the NWs were determined: the length is about 2-24 µm, and the width and height are about 200-500 nm.

1. POSTER: SEM investigations of the surface and cross-section features of ZnO nanowires under focused ion beam treatment, Microsoft Office Document, 0MB

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