Search for content and authors
 

dr Erwin Kessels

e-mail:
phone: +31-40-2473477
fax: +31-40-2456442
web:
interest(s):

Affiliation:

Eindhoven University of Technology

address: P.O. Box 513, Eindhoven, 5600MB, Netherlands
phone:
fax:
web: http://www.tue.nl

Participant:

E-MRS Fall Meeting 2007

began: 2007-09-17
ended: 2007-11-30
Presented:
E-MRS Fall Meeting 2007
Remote plasma ALD of oxides and nitrides: fundamentals and applications

Publications:
  1. Remote plasma ALD of oxides and nitrides: fundamentals and applications



Google
 
Web science24.com
© 1998-2024 pielaszek research, all rights reserved Powered by the Conference Engine