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- Wenke Weinreich

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Affiliation:


Fraunhofer Center Nanoelektronische Technologien

address: , Dresden, 01099, Germany
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Affiliation:


Fraunhofer Center Nanoelectronic Technology

address: Königsbrücker Straße 180, Dresden, 01099, Germany
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Participant:


E-MRS Fall Meeting 2007

began: 2007-09-17
ended: 2007-11-30
Presented:

E-MRS Fall Meeting 2007

Thermal Stability of thin ALD ZrO2 Layers as Dielectrics in Deep Trench DRAM Devices Annealed in N2 and NH3

Publications:


  1. Thermal Stability of thin ALD ZrO2 Layers as Dielectrics in Deep Trench DRAM Devices Annealed in N2 and NH3
  2. Verification of Grain Boundaries in Annealed Thin ZrO2 Films by Electrical AFM Technique



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