dr Kaupo Kukli

Affiliation:

Department of Physics, University of Tartu

Participant:

E-MRS Fall Meeting 2007

Publications:

1. ALD of ZrO₂ Thin Films Exploiting Novel Mixed Alkylamido-Cyclopentadienyl Precursors
2. Atomic Layer deposition of iron oxide nanotubes
3. Atomic Layer Deposition of Oxide Dielectric Films for Microelectronics
4. Conduction mechanisms in nanolaminates and mixture films grown by atomic layer deposition
5. Electrical properties of high-k materials prepared by ALD