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- Bojan Mitrovic
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Affiliation:
Veeco Instruments Inc.
address:
394 Elizabeth Avenue, New Jersey, NJ, 08873,
United States
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Participant:
17th International Conference on Crystal Growth and Epitaxy - ICCGE-17
began:
2013-08-11
ended:
2013-08-16
Presented:
17th International Conference on Crystal Growth and Epitaxy - ICCGE-17
Effect of process conditions on wafer curvature due to thermal stresses and wafer-to-carrier temperature gradient during MOCVD growth in vertical rotating disc reactors
Publications:
Effect of process conditions on wafer curvature due to thermal stresses and wafer-to-carrier temperature gradient during MOCVD growth in vertical rotating disc reactors
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