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Patrick Hoffmann

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Affiliation:


Brandenburg Technical University

address: Erich Weinert Str. 1, Cottbus, 03044, Germany
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fax:
web: http://www.physik.tu-cottbus.de/physik/ap2/

Affiliation:


Brandenburg Technical University, Department of Applied Physics/Sensorics

address: Erich Weinert Str. 1, Cottbus, 03044, Germany
phone:
fax:
web: http://www.physik.tu-cottbus.de/physik/ap2/

Participant:


E-MRS Fall Meeting 2003

began: 2003-09-15
ended: 2003-09-11
Presented:

E-MRS Fall Meeting 2003

Photoemission studies of very thin (<10nm) silicon oxynitride (SiO_xN_y) layers formed by PECVD

Publications:


  1. Photoemission studies of very thin (<10nm) silicon oxynitride (SiO_xN_y) layers formed by PECVD



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