ZnMnO Films grown by Atomic Layer Deposition with uniform Mn distribution

Krzysztof Kopalko 1Aleksandra Wójcik 1Marek Godlewski 1,2Elżbieta Guziewicz 1Rafał Jakieła 1Matti Putkonen 3,4Lauri Niinisto 3

1. Polish Academy of Sciences, Institute of Physics, al. Lotników 32/46, Warszawa 02-668, Poland
2. Cardinal Stefan Wyszynski University, College of Science, Warszawa, Poland
3. Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, P.O. Box 6100, FIN-02015 Espoo, Helsinki, Finland
4. Benq Oy, Ensimmäinen savu, Vantaa FIN-01510, Finland


Atomic layer deposition (ALD) method enables a low temperature (LT) growth, using reactive organic precursors. This is possible, since reaction precursors are sequentially introduced to a growth chamber. Thus, they meet only at a surface of a growing film. Our recent investigations indicated that LT growth is the most promising way to avoid formation of foreign phase inclusions of MnxOy in ZnMnO material and to block spinodal decomposition [1-3]. This are crucial steps for obtaining material with controlled magnetic properties. ZnMnO is intensively studied for spintronics applications at present. It was clearly shown that inclusions of various Mn oxides, which are present in most of films grown with high temperature methods, give dominating magnetic response of the ZnMnO samples.

In this presentation we discuss growth conditions of LT ZnMnO with the ALD method optimized to get the required structural and magnetic properties. We show that LT ALD films of ZnMnO, those obtained with either zinc acetate or DEZn and Mn(acac)3 or Mn(thd)3 as zinc and manganese precursors, are practically inclusions free. The so-obtained material is promising for spintronics applications under the condition that p-type doping will be improved.

1. A. Wójcik, K. Kopalko, M. Godlewski, E. Guziewicz, R. Jakieła, R. Minikayev, W. Paszkowicz

Appl. Phys. Lett. 89, 051907 (2006).

2. A. Tomaszewska – Grzęda, A. Opalińska, E. Grzanka, W. Łojkowski A. Gedanken, M. Godlewski, S. Yatsunenko, V. Osinniy, and T. Story

Appl. Phys. Lett. 89, 242102 (2006)

3. A. Wójcik, M. Godlewski, E. Guziewicz, R. Jakieła, M. Kiecana, M. Sawicki, M. Guziewicz, M. Putkonen, L. Niinistö, Y. Dumont, and N. Keller

Appl. Phys. Lett. (in press)


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Presentation: Poster at Joint Fith International Conference on Solid State Crystals & Eighth Polish Conference on Crystal Growth, by Krzysztof Kopalko
See On-line Journal of Joint Fith International Conference on Solid State Crystals & Eighth Polish Conference on Crystal Growth

Submitted: 2007-01-19 15:59
Revised:   2013-02-28 15:04