Nanopatterned Ba_0.8Sr_0.2TiO₃ (BST), SrBi₂Ta₂O₉ (SBT), and NaNbO₃ (NN) ferroelectric thin films were deposited by the PLD on various substrates Si/SiO₂/Ti/Pt, Si/SrRuO₃ and Si. Structural properties of the films were analyzed by the RENISHAW micro Raman spectrometer in the temperature range from 80 - 573 K. The surface morphology and piezoresponse were analyzed by the AFM with conventional Si and TiN tips in the contact and taping modes. The Carl Zeiss brand model EVO 50 XVP SEM was used to characterize the local composition and structure of the BST, SBT and NN thin films. The optical measurements were performed by means of a J. A. Woollam spectral ellipsometer operating in rotating analyzer mode. The main ellipsometric angles ψ and Δ were measured in the spectral range from 250 to 1000 nm at the incident angles 65, 70 and 75 degrees. For optical constant calculation, Lorentz, Cauchy, Urbach and other models were used. Surface roughness were also taken into account using effective medium aproximation theory. Dependence of the Raman spectrum, refractive and extinction coefficients, optical band gap energy, and surface roughness on film structure was analyzed.

Acknowledgments: This research was supported by the COST Fellowships, by the European Social Fund and K. Morberg scholarship of the University of Latvia.

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