Surface investigations of TiN layers on different substrates
|Łukasz Zięba , Janusz Jaglarz|
Cracow University of Technology, Institute of Materials Science and Metal Technology, Kraków, Poland
The subject of this presentation are TiN layers deposited on steel, silicon and glass substrates. TiN coverages have been prepared by the arc physical vapor deposition (PVD) technique. TiN are well known material used in many industrial applications. Particularly the TiN is a very attractive material for creation of hard protective coating layers. The final useful mechanical properties of TiN coating layers are strongly determined by surface morphology. It depends on many factors i.e topography of substrates, deposition technology, mechanical or thermical treatments. For this reasons the optical, AFM and SEM measurements have been done. The optical methods comprised: integrating sphere, double beam reflectometer, XY optical profilometer measurements in the range from 190 nm to 2500 nm. Additionally for refraction n and extinction k coefficients the ellipsometric study has been performed. As a complemented to AFM and SEM method, the BRDF (bidirectional reflection distribution function measurements have been performed. It is based on analysis of scattered radiation intensity from samples for different scatter angles. The power spectral density is proportional to BRDF signal and then it allow to evaluate surface parameters on much bigger than AFM and SEM surface area. The statistical surface parameters of substrates and layers before and after mechanical and thermal treatment have been obtained. The statistic surface make up: PSD (power spectral density), roughness, correlation length and distribution of heights. It allowed to estimate correlation functions of surface statistic before and after deposition and measure surface parameters after mechanical and thermo-mechanical treatments.
Presentation: Poster at E-MRS Fall Meeting 2006, Symposium A, by Łukasz Zięba
See On-line Journal of E-MRS Fall Meeting 2006
Submitted: 2006-05-12 21:36 Revised: 2009-06-07 00:44