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Residual stresses in TiN-Ni nanocomposite coatings deposited by reactive ion beam assisted deposition

Jean Paul Riviere ,  Alireza Akbari ,  Claude Templier ,  Pierre Olivier Renault ,  Gregory Abadias ,  Eric LeBourhis 

Laboratoire de Métallurgie Physique (LMP), Bvd M. et P. Curie, Futuroscope 86962, France

Abstract

Often, the enhanced hardness reported for nanostructured coatings is associated with high residual compressive stresses. In this work, we report on the hardness enhancement in TiN-Ni nanocomposite coatings wihtout increase of stress in the coatings. Nanocomposite coatings of nc-TiN/a-Ni were deposited using an ultrahigh vacuum dual ion beam sputtering system from a composite Ti-Ni target sputtered with 1,2 keV Ar+ ions and the growing film was bombarded during deposition with a mixture of 50 eV Ar+-N2+-N+ ions . The residual stress in the coatings was determined using XRD analysis and crystallite group method . The results are compared with the conventional sin2ψ and radius of curvature methods. For the films deposited at 300°C the progressive addition of Ni in TiN produced a decrease of coating residual stresses and for films deposited at RT they remain nearly constant. For both temperatures, the hardness increases and exhibits a maximum in the range 5 to 10 at% Ni.

 

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Related papers

Presentation: Poster at E-MRS Fall Meeting 2006, Symposium A, by Jean Paul Riviere
See On-line Journal of E-MRS Fall Meeting 2006

Submitted: 2006-05-11 12:40
Revised:   2009-06-07 00:44