Investigation of Deformation Fields Anisotropy in Multilayered (In,Ga)As/GaAs Structures with Quantum Wires by HRXRD.
|Oleksandr N. Yefanov 1, Vasyl P. Kladko 1, O Y. Gudymenko 1, V V. Strelchuk 1, Yu I. Mazur , Zh V. Wang 2, G. J. Salamo|
1. V.Lashkaryov Institute of Semiconductor Physics NAS Ukraine (ISP), Nauky prosp., Kyiv 03028, Ukraine
The results of investigation of In0.3Ga0.7As/GaAs superlattices with quantum wires by High-Resolution X-Ray Scattering are presented. The influence of lattice distortion on rocking curves (RC) was analyzed with dynamical theory of diffraction. It allowed explaining azimuth dependence of experimental rocking curves. Anisotropic changes in the shape of InGaAs lattice unit cell were shown and measured.
Presentation: poster at E-MRS Fall Meeting 2005, Symposium A, by Oleksandr N. Yefanov
See On-line Journal of E-MRS Fall Meeting 2005
Submitted: 2005-05-30 15:15 Revised: 2009-06-07 00:44
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