Methane is a highly flammable gas that explodes in the air when reacting with other pollutants. The explosive limit of methane gas is 5%. However, detection of lower concentrations is necessary for prevention and warning purposes in a leaking system. We developed a simple method of fabricating thin films of granular indium oxide (In₂O₃) particles decorated with Ni₂O₃ nanoparticles for a high-response methane gas sensor. The In₂O₃ granular film was fabricated by sputter-deposition of indium followed by oxidation. Ni nanoparticles were deposited onto the In₂O₃ film by the arc-discharge deposition of single-wall carbon nanotubes followed by the burning out of these nanotubes. The catalyst Ni nanoparticles distributed in the single-wall carbon nanotubes were oxidized to Ni₂O₃. The sensors exhibited tens of % response per 100 ppm methane gas concentration.

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