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Anisotropic characteristics of a-plane GaN grown on r-plane sapphire by metalorganic chemical vapor deposition

Yong Gon Seo ,  Sun Hye Shin ,  Doo Soo Kim ,  Sung-Min Hwang 

Korea Electronics Technology Institute, Seongnam 463-816, Korea, South

Abstract

Nonpolar nitrides have attracted considerable attention due to the potential for eliminating undesirable electric field effects and the possibility of producing devices with higher efficiencies than conventional c-plane nitrides [1]. The nonpolar nitride films with a-plane and m-plane have been grown on r- and m- plane sapphire, (302) and (100) LiAlO2, a- and m-plane SiC, and a- and m-plane GaN substrates [2]. The structural anisotropies of the nonpolar nitride films were expected due to the unequal growth rate [3] so there is a dependence of the full widths at half maximum (FWHMs) of X-ray rocking curves (XRCs) on the azimuth angle. In this work, we report on the anisotropic characteristics of a-plane GaN films that have an M-shape or W-shape dependence on the azimuth angle with minimum FWHM along the c-axis or m-axis directions of a-plane GaN. 
  Nonpolar a-plane GaN films were grown on 2 inch r-plane sapphire substrates by metalorganic chemical vapor deposition. With the control of nucleation and three-dimensional growth conditions, we obtained M-shape (sample A) and W-shape (sample B) a-plane GaN films depending on the azimuth angle. The surface morphology and the crystalline quality of samples A and B were characterized by high resolution X-ray diffraction and atomic force microscopy (AFM). For optical properties, photoluminescence (PL) measurements at room temperature were carried out using a 266 nm laser.
  1 x 1 μm2 AFM images of the surface morphologies of samples A and B are shown in Fig. 1(a) and (b). Both samples had a smooth surface and the root mean square (RMS) of samples A and B was found to be 0.5 and 0.8 nm, respectively. The structure qualities of samples A and B were evaluated from the FWHM of XRC. Figure 2 shows the FWHMs of XRC of a-plane GaN films along with the azimuth angle. Azimuth angles of 0o and 90o were defined as the projection of the incident beam being parallel to the [0001] and [1-100] directions, respectively. The FWHMs of the (11-20) XRC for samples A and B were found to be dependent on the azimuth angle. Sample A had M-shape behavior and the FWHM values of the [0001] and [1-100] directions were 474 and 638 arcsec, respectively. The FWHMs of the [0001] and [1-100] directions for sample B with W-shape anisotropy were found to be 856 and 542 arcsec, respectively. The crystal quality of sample A along the [0001] direction was better than sample B and the reverse was found for crystal quality along the [1-100] direction. Room temperature PL spectra of samples A and B are shown in Fig. 3. Both spectra displayed the near band-edge emission at 363.4 nm and the FWHMs of the PL for samples A and B were 12.9 and 12.7 nm, respectively. The PL intensity of sample B was 1.7 times stronger than that of sample A although the average crystal quality of sample A was better than that of sample B. This indicates that the PL intensity of a-plane GaN layer is more affected by the crystal quality of the [1-100] direction rather than the [0001] direction. 

References: 
 [1] P. Waltereit, O. Brandt, A. Trampert, H. T. Grahn, J. Meinnger, M. Ramsteiner, M. Reiche, and K. H. Ploog, Nature (London) 406, 865 (2000).
[2] V. Darakchieva, M.-Y. Xie, N. Franco, F. Giuliani, B. Nunes, E. Alves, C. L. Hsiao, L. C. Chen, T. Yamaguchi, Y. Takagi, K. Kawashima, and Y. Nanishi, J. Appl. Phys. 108, 073529 (2010).
[3] H. Wang, C. Chen, Z. Gong, J. Zhang, M. Gaevski, M. Su, J. Yang, and M. A. Khan, Appl. Phys. Lett. 84, 499 (2004).  

AFM1.JPG

 Figure 1. AFM images of a-plane GaN films: (a) sample A and (b) sample B. 

XRD.jpg Figure 2. Azimuth angle dependence of the FWHM of the (11-20) rocking curves for a-plane GaN films. 

AFM2.JPG

Figure 3. PL intensities for samples A and B at room temperature.

 

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Presentation: Poster at 17th International Conference on Crystal Growth and Epitaxy - ICCGE-17, General Session 10, by Yong Gon Seo
See On-line Journal of 17th International Conference on Crystal Growth and Epitaxy - ICCGE-17

Submitted: 2013-03-22 08:59
Revised:   2013-03-22 10:03