Effect of carbon contents on the structural and mechanical properties of sputtered (AlCrTaTiZr)Cx coatings

Keng-Hao Cheng ,  Ting-Wei Liu ,  Su-Jien Lin ,  Jien-Wei Yeh 

Department of Materials Science and Engineering, National Tsing Hua University (NTHU), 101, Sec 2, Kuang-Fu Road, Hsinchu 30013, Taiwan


The (AlCrTaTiZr)Cx films are deposited onto Si substrates and cemented carbide plates by dual-gun RF magnetron sputtering. The carbon contents are controlled by tuning the applied power of each target, and ranged from 0 to nearly 50 at.% determined by EPMA analysis. The influence on the crystal structure, cross-sectional microstructure, hardness and other mechanical properties is also investigated. Without the carbon additions, the AlCrTaTiZr alloy film exhibits an amorphous structure and shows a glass-like microstructure by SEM observation. Another distinguished peak in XRD pattern is found as the carbon atoms are incorporated, which is considered as the multi-element carbide phase. These (AlCrTaTiZr)Cx films perform a nanocomposite structure with FCC carbide nanocrystallites embedded in an amorphous alloy matrix. The hardness and modulus are increasing with the raised carbon contents. The friction coefficient and wear rate of coatings are also improved by carbon addition.

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Presentation: Oral at E-MRS Fall Meeting 2009, Symposium I, by Keng-Hao Cheng
See On-line Journal of E-MRS Fall Meeting 2009

Submitted: 2009-05-11 13:30
Revised:   2009-06-07 00:48
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