Processes of nucleation and shaping of nanostructurity of surface of substrates with different physical - chemical nature where investigated ultra thin metallic films (Ag, Cr with thickness 20 - 100 nm) were deposited on polymer (PET) and quartz glass substrates by evaporation in vacuum. XRD and AFM were employed to study structural and morphological changes of the films. Surface composition of these films was investigated by XPS.
It is found that the size of nanostructured formations can be changed by changing the evaporation rate and substrate temperature (essentially reaching the polymer glassing temperature region). Changes of optical and electrical properties were registered by parallel optical transmittance and resistivity measurements. Nucleation and coalescence process of metallic films on different substrates at the high temperature region dependent on the used metals and substrate surface nature.

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