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Molecular fractal surfaces analysis with spectroscopic ellipsometry

Frédéric Ferrieu 1Jean-Philippe Piel 2Jean-Louis Stehlé 2Adrien Danel 3

1. STMicroelectronics, 850 rue Jean Monnet, Crolles CEDEX 38926, France
2. SOPRA SA, 26 Pierre Joigneaux, Bois-Colombes 92270, France
3. CEA-LETI-MINATEC (MINATEC), 17 rue des Martyrs, Grenoble 38054, France

Abstract

It is known for years that surface adsorption/desorption can be studied by in Situ Spectroscopic Ellipsometry (SE). The physical adsorption of water or other small adsorbate molecules species on the surface of non-porous materials, gives rise to a Type II isotherms which can be measurerd with sufficient accuracy by SE. The paper reports on recent highlights of this promising application of SE as interpretated with the fractal description of surfaces. The adsorption theories including the effect of fractal properties of thin films surfaces have been recently reviewed and corresponding models can be specifically applied to SE analysis. Within the concept of the surface fractal properties, the study of surface adsorption provides interesting parameters such as dimensionality and surface energy parameters to be correlated with other instrumental observations. Some examples are presented and discussed.

 

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Related papers

Presentation: Oral at E-MRS Fall Meeting 2008, Workshop, by Jean-Louis Stehlé
See On-line Journal of E-MRS Fall Meeting 2008

Submitted: 2008-05-20 17:01
Revised:   2009-06-07 00:48