Synthesis of piezoelectric materials used for production of thin-film nanostructures on superficial acoustic waves is one of perspective scientific and technical directions on creation of multipurpose sensor controls. They are sensitive to various physical and chemical influences. In this connection piezo active  materials of sprayed targets on a basis of micro-nanopowders of zinc oxide  with additives of rare-earth elements and their compound (oxides, fluorides, hydrides) are developed. Use of nanosize and submicron powders allows to lower sintering temperature, to activate processes of sintering and to receive high density (above 98 %) fine-grained (0,5-2,0 µm) targets. The fine-grained structure of a material target promotes stabilization of process parameters of their vacuum spraying and obtaining of piezoelectric touch microsystems. Introduction of microadditives of rare-earth compound  in concentration of  0,1-5,0 %  leads to increase of electro-acoustic properties of piezoelectric thin films, in particular their factor of electromechanical communication. Moreover, microadditives substantially define influence of physical and chemical actions on geometrical, electric and elastic properties of a sensitive piezoelectric layer of a microsensor control on PEAHENS. With use of the developed targets multilayered structures for excitation of superficial waves are received, and also multipurpose touch microsystems of the control of temperature, pressure, structure of gas environments are created.

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