Air-blast spray deposition (ASD), using liquid droplets atomized by gas pressure, are based on the aerosol technique. This technique has shown many advantages over several conventional deposition techniques, such as a simple set-up, inexpensive and nontoxic precursors, high deposition rate and, in particular, easy control of the surface morphology of the deposited layers. This method also enables the thin film deposition in ambient atmosphere even if an additional heat treatment is required to obtain film with high degree of crystallinity.

In this work, ASD was applied to prepare porous lanthanum strontium manganite (LSM) films on silicon substrate for the electrolyte application in Solid Oxide Fuel Cell. The morphology of LSM film was dependant on the process parameters such as substrate temperature, liquid flow rate, deposition time, and nozzle-substrate distance. The effects of heating temperature on the crystal structure of films were investigated with X-ray diffraction (XRD) in the heating temperature range of 400 ^oC to 1000 ^oC. The porous LSM film was successfully prepared in the solution flow rate range of 1 l/min to 3.5 l/min, the substrate temperature of 149 ^oC to 243 ^oC, the nozzle-substrate distance range of 1 cm to 10 cm, and the deposition time of 0.5 min to 30 min.

1. PRESENTATION: Lanthanum strontium manganite films prepared by air-blast spray deposition technique, Microsoft Office Document, 0MB

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1. Fabrication of Sm_0.5Sr_0.5CoO₃ cathode thin films for IT-SOFC by Electrostatic Spray Depositon