There is a growing interest in the use of nanostructures including nanotubes and nanowires, because they have demonstrated great potential in a variety of applications for NEMS (nanoelectromechanical systems). Understanding the mechanical behavior of nanowire is very important when it is adopted as the component of NEMS. This research has developed OCTT (on-chip tensile tester) which is designed to measure the mechanical properties of nanowires. OCTT consists of 3 parts: measurement part, actuator part, and supporting part. The OCTT is fabricated by MEMS process and makes from 6 inch SOI wafer with 350μm thickness. From the measurement beam, we can indirectly measure the specimen’s elongation by a scale bar on measurement part. In addition, the relation between specimen’s elongation and measurement beam’s deformation is calculated by traditional beam theory in the mechanics of solids. The driving principle of actuating part is that the electrostatic force between comb fingers is induced when the voltage difference occurs in comb drive fingers. In this research, OCTT contains 10,000 comb drive fingers. The specimen is the nanowire that is attached across the trench in specimen part of OCTT after OCTT was fabricated completely. The bonding condition and alignment of specimens are very important factor in acquiring accurate data of tensile test. The supporting part consists of the suspended beams with constant stiffness, and sustains the whole device. As a result, we obtain the mechanical properties of nanowire such as Young’s modulus, ultimate tensile strength, fracture strength, yield strength, and stress-strain curve.

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