The paper presents some microelectromechanical structure of  piezo and electrostrictive actuators  based  on polymeric membranes.

 The microstructure are the planar  and multilayers microactuators

 with the thin disc element .

  A composite film based on a poly(ether imide) with pyrite powder and Magnetic powders were mechanically incorporated in a polymeric matrix consisting in interconnected polydimethylsiloxane/silica networks has been prepared and its nanoactuation has been investigated.

   In Fig.1  is presented a specific electrostrictive linear actuation for a polymeric membrane.

   The authors  propose some methods for experimental investigations of the specific nano and microelectromechanical parameters of the electrostrictive or piezoelectric polymeric membrane which are utilized in structure of microactuators or artificial  muscle.

  There are presented the investigations of the nano and microdisplacement  , the microforce, the behaviour of the membrane to different electric signal or differents micromechanical stress. The resolution of the experimental  nano and microdisplacements is 2 nm.

  This method  are based on the AGILENT interferometric System and  VEECO optical interferometric microscope NT 1100 which are endowed the MEMS and NEMS  laboratory of the INCDIE  CA.

Fig. 1. Nanometric displacement of the composite polymer film  containing 20% pyrite,

at 10 V dc with flexible thin electrodes, at 3.5 seconds commutation time.

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