Conical recessed gold microelectrode arrays produced during photolithographic methods: Characterisation and causes

Francisco A. Aguiar 1Andrew J. Gallant 2Mark C. Rosamond 2David Wood 2Ritu Kataky 1

1. University of Durham (UDUR), South Rd, Durham DH13LE, United Kingdom
2. School of Engineering, University of Durham, Science Labs, South Road, Durham DH1-3LE, United Kingdom


In this work, surface imaging techniques such as scanning Kelvin nanoprobe (SKN), scanning electron microscopy (SEM) and white light interferometer microscopy show that conical recessed electrodes with gradient potential along the recessed walls are formed during standard photolithographic methods for producing microelectrode arrays. The experimental behaviour of these electrode arrays fits very well with the numerical solution using optimal quasi-conformal mappings proposed recently by Amatore and co-workers [C. Amatore, A. Oleinick, I. Svir, J. Electroanal. Chem. 597 (2006) 69; C. Amatore, A. Oleinick, I. Svir, J. Electroanal. Chem. 597 (2006) 77]. The possible reasons for the formation of conical recesses are discussed.

Legal notice
  • Legal notice:

    Copyright (c) Pielaszek Research, all rights reserved.
    The above materials, including auxiliary resources, are subject to Publisher's copyright and the Author(s) intellectual rights. Without limiting Author(s) rights under respective Copyright Transfer Agreement, no part of the above documents may be reproduced without the express written permission of Pielaszek Research, the Publisher. Express permission from the Author(s) is required to use the above materials for academic purposes, such as lectures or scientific presentations.
    In every case, proper references including Author(s) name(s) and URL of this webpage: must be provided.


Presentation: Short communication at SMCBS'2007 International Workshop, by Francisco A. Aguiar
See On-line Journal of SMCBS'2007 International Workshop

Submitted: 2007-09-06 21:37
Revised:   2009-06-07 00:44
© 1998-2022 pielaszek research, all rights reserved Powered by the Conference Engine