Conical recessed gold microelectrode arrays produced during photolithographic methods: Characterisation and causes

Francisco A. Aguiar 1Andrew J. Gallant 2Mark C. Rosamond 2David Wood 2Ritu Kataky 1

1. University of Durham (UDUR), South Rd, Durham DH13LE, United Kingdom
2. School of Engineering, University of Durham, Science Labs, South Road, Durham DH1-3LE, United Kingdom

Abstract

In this work, surface imaging techniques such as scanning Kelvin nanoprobe (SKN), scanning electron microscopy (SEM) and white light interferometer microscopy show that conical recessed electrodes with gradient potential along the recessed walls are formed during standard photolithographic methods for producing microelectrode arrays. The experimental behaviour of these electrode arrays fits very well with the numerical solution using optimal quasi-conformal mappings proposed recently by Amatore and co-workers [C. Amatore, A. Oleinick, I. Svir, J. Electroanal. Chem. 597 (2006) 69; C. Amatore, A. Oleinick, I. Svir, J. Electroanal. Chem. 597 (2006) 77]. The possible reasons for the formation of conical recesses are discussed.

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Presentation: Short communication at SMCBS'2007 International Workshop, by Francisco A. Aguiar
See On-line Journal of SMCBS'2007 International Workshop

Submitted: 2007-09-06 21:37
Revised:   2009-06-07 00:44
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