Quantitative transmission electron microscopy investigation of localised stress in heterostructures |
Slawomir Kret 1, Paweł Dłużewski 2, Grzegorz Maciejewski 2, Grzegorz Jurczak 2, Pierre Ruterana 3, Jiakang Chen 3, Piotr Dłużewski , Elżbieta Janik 1 |
1. Polish Academy of Sciences, Institute of Physics, al. Lotników 32/46, Warszawa 02-668, Poland |
Abstract |
We present methods and results of investigation of the local strain and stress at atomic scale in highly stressed GaN/Saphire and GaAs/CdTe buffer layers.
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